Fabrication and simulation of diffractive optical elements with superimposed antireflection subwavelength gratings

Applied Optics

Volumn 39, Issue 26, 2000, Pages 4842-4846

  Nikolajeff, Fredrik ^a   Löfving, Björn ^b   Johansson, Mathias ^b   Bengtsson, Jörgen ^b   Hård, Sverker ^b   Heine, Claus ^c  

^a UPPSALA UNIVERSITY   (Sweden)

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^c Thin Film Products AG   (Liechtenstein)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; LIGHT POLARIZATION; LIGHT REFLECTION;

SUBWAVELENGTH GRATINGS;

DIFFRACTIVE OPTICS;

EID: 0013156864     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.004842     Document Type: Article

References (9)

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