메뉴 건너뛰기




Volumn 102, Issue 10, 2007, Pages

Microstructure analysis of epitaxially grown self-assembled Ge islands on nanometer-scale patterned SiO2 Si substrates by high-resolution transmission electron microscopy

Author keywords

[No Author keywords available]

Indexed keywords

BLOCK COPOLYMERS; EPITAXIAL GROWTH; GERMANIUM; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MICROSTRUCTURE; SELF ASSEMBLED MONOLAYERS; SILICA;

EID: 36749006182     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2812610     Document Type: Article
Times cited : (6)

References (31)
  • 1
    • 3643130905 scopus 로고
    • 0031-9007 10.1103/PhysRevLett.64.1943
    • D. J. Eaglesham and M. Cerullo, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.64.1943 64, 1943 (1990).
    • (1990) Phys. Rev. Lett. , vol.64 , pp. 1943
    • Eaglesham, D.J.1    Cerullo, M.2
  • 7
    • 1842738090 scopus 로고    scopus 로고
    • 0003-6951 10.1063/1.1664014
    • Z. Zhong and G. Bauer, Appl. Phys. Lett. 0003-6951 10.1063/1.1664014 84, 1922 (2004).
    • (2004) Appl. Phys. Lett. , vol.84 , pp. 1922
    • Zhong, Z.1    Bauer, G.2
  • 18
    • 6744224411 scopus 로고    scopus 로고
    • 0084-6600 10.1146/annurev.matsci.29.1.173
    • H. Gao and W. D. Nix, Annu. Rev. Mater. Sci. 0084-6600 10.1146/annurev.matsci.29.1.173 29, 173 (1999).
    • (1999) Annu. Rev. Mater. Sci. , vol.29 , pp. 173
    • Gao, H.1    Nix, W.D.2
  • 20
    • 36749004775 scopus 로고    scopus 로고
    • The exact cleaning procedure is as follows: First the substrate is dipped in Piranha solution (H2 O2: H2 SO4 =3:5) for 10 s and then in aqueous HF solution (HF: H2 O=1:100) for 10 s. This procedure is repeated three times. The Si substrate is finally hydrogen terminated and introduced into a molecular beam epitaxy chamber.
    • The exact cleaning procedure is as follows: First the substrate is dipped in Piranha solution (H2 O2: H2 SO4 =3:5) for 10 s and then in aqueous HF solution (HF: H2 O=1:100) for 10 s. This procedure is repeated three times. The Si substrate is finally hydrogen terminated and introduced into a molecular beam epitaxy chamber.
  • 24
    • 0034226537 scopus 로고    scopus 로고
    • F. M. Ross, IBM J. Res Dev. 44, 489 (2000).
    • (2000) , vol.44 , pp. 489
    • Ross, F.M.1
  • 26
    • 33745905893 scopus 로고
    • 0021-8979 10.1063/1.349282
    • S. M. Hu, J. Appl. Phys. 0021-8979 10.1063/1.349282 70, R53 (1991).
    • (1991) J. Appl. Phys. , vol.70 , pp. 53
    • Hu, S.M.1
  • 31
    • 0001396627 scopus 로고    scopus 로고
    • 0003-6951 10.1063/1.118920
    • A. L. Barabási, Appl. Phys. Lett. 0003-6951 10.1063/1.118920 70, 2565 (1997).
    • (1997) Appl. Phys. Lett. , vol.70 , pp. 2565
    • Barabási, A.L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.