Surface roughening of heteroepitaxial thin films

Annual Review of Materials Science

Volumn 29, Issue , 1999, Pages 173-209

  Gao, Huajian ^a   Nix, William D ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; CRYSTAL LATTICES; CURVE FITTING; DIFFUSION IN SOLIDS; DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; STRESS CONCENTRATION; STRESS RELAXATION; SURFACE ROUGHNESS; SURFACE STRUCTURE; THERMODYNAMICS;

CYCLOIDS; HETEROEPITAXIAL STRUCTURES; MASS DIFFUSION;

THIN FILMS;

EID: 6744224411     PISSN: 00846600     EISSN: None     Source Type: Book    
DOI: 10.1146/annurev.matsci.29.1.173     Document Type: Book

References (66)

1. Kordos P, Novak J, eds. 1998. Heterostructure Epitaxy and Devices. Boston: Kluwer
2. Pearsall TP, ed. 1990. Strain Layer Superlattices. Boston: Academic
3. Asaro RJ, Tiller WA, 1972. Metall. Trans. 3:1789
4. Grinfeld MA. 1986. Sov. Phys. Dokl. 31:831
5. Srolovitz DJ. 1989. Acta Metall. 37.621
6. Gao H. 1991. In Modern Theory of Anisotropic Elasticity and Applications, ed. JJ Wu, TCT Tins, DM Barnett. p. 139. Philadelphia: SIAM
7. Spencer BJ, Voorhees PW, Davis SH. 1991. Phys. Rev. Lett. 67:3696
8. Freund LB, Jonsdottir F. 1993. J. Mech. Phys. Solids 41:1245
9. Chiu Ch, Gao H. 1993. Int. J. Solids Struct. 30:2983
10. Yang WH, Srolovitz SJ. 1993. Phys. Rev. Lett. 71:1593
11. Spencer BJ, Meiron DI 1994. Acta Metall. 42:3629
12. Chiu Ch, Gao H. 1994. MRS Symp. Proc. 317:369
13. Chiu Ch, Gao H. 1995. MRS Symp. Proc. 356:33
14. Chiu Ch. 1995. Diffusive cusp-crack initiation on a stressed solid. PhD thesis, Stanford Univ.
15. Eaglesham DJ, Cerullo M. 1990. Phys. Rev. Lett. 64:1943
16. Guha S, Madhukar A, Rajkumar KC. 1990. Appl. Phys. Lett. 57:2110
17. Snyder CW, Orr BG, Kessler D, Sander LM. 1991. Phys. Rev. Lett. 66:3032
18. Tersoff J, LeGoues FK. 1994. Phys. Rev. Lett. 72:3570
19. Yao JY, Andersson TG, Dunlop GL. 1988. Appl. Phys. Lett. 53:1420
20. Cullis AG, Robbins DJ, Pidduck AJ, Smith PW. 1991. J. Cryst. Growth 123: 333
21. Pidduck AJ, Robbins DJ, Cullis AG, Leong WY, Pitt AM. 1992. Thin Solid Films 222:78
22. Jesson DE, Pennycook SJ, Baribeau JM, Houghton DC. 1993. Phys. Rev. Lett. 71: 1744
23. Ozkan CS, Nix WD, Gao H. 1997. Appl. Phys. Lett. 70:2247
24. Ozkan CS. 1997. Studies of morphological instability and defect formation in heteroepitaxia! Si(1-x)Ge(x) thin films via controlled annealing experiments. PhD thesis, Stanford Univ.
25. Matthews JW, Blakeslee AE. 1974. J. Cryst. Growth 27:118
26. Freund LB. 1987. J. Appl. Mech. 54: 553
27. Nix WD. 1989. Metall. Trans. 20A:2217
28. Nix WD, Noble DB, Turlo JF. 1990. MRS Symp. Proc. 188:315
29. Gillard VT, Noble DB, Nix WD. 1992. MRS Symp. Proc. 239:395
30. x heteroepitaxial films. PhD thesis, Stanford Univ.
31. Alivisatos AP. 1998. MRS Bull. 23:18
32. Zunger A. 1998. MRS Bull. 23:15
33. Gao H 1991. J. Mech. Phys. Solids 39:443
34. Gao H. 1994. J. Mech. Phys. Solids 42: 741
35. Grinfeld MA. 1993. J. Nonlinear Sci. 3:35
36. Gao H. 1991. Int. J. Solids Struct. 28:703
37. Tersoff J. 1995. Phys. Rev. Lett. 74:4962
38. Ozkan CS, Nix WD, Gao H. 1997. MRS Svmp. Proc. 436:487
39. Rice JR. 1968. In Fracture, ed. H Liebowitz. 2:191. New York: Academic
40. Gao H. 1995. Proc. R. Soc. London Ser. A 448:65
41. Gao H. 1995. Proc. R. Soc. London Ser. A 450:732
42. Mullins WW. 1957. J. Appl. Phys. 28:333
43. Mullins WW, Sekerka RF. 1964. J. Appl. Phys. 35:444
44. Williams ML. 1952. J. Appl. Mech. 74: 526
45. Jesson DE, Chen KM, Pennycook SJ. 1996. MRS Bull. 21:31
46. Deleted in proof
47. Ozkan CS, Nix WD, Gao H. 1996. MRS Svmp. Proc. 399:407
48. Ozkan CS, Nix WD, Gao H. 1997. MRS Symp. Proc. 442:373
49. Ozkan CS, Nix WD, Gao H. 1997. MRS Symp. Proc. 440:323
50. Jonsdottir F, Freund LB. 1995. Mech. Mater. 20:337
51. Guyer JE, Voorhees PW. 1998. J. Cryst. Growth 187:150
52. Cullis AG, Pidduck AJ, Emeny MT. 1995. Phys. Rev. Lett. 75:2368
53. Gao H, Ozkan CS, Nix WD, Zimmerman JA, Freund LB. 1999. Phil. Mag. A 79:349-70
54. Muellner P, Gao H, Ozkan CS. 1997. Phil. Mag. A 75:925
55. LeGoues F, Copel M, Tromp R. 1989. Phys. Rev. Lett. 63:826
56. LeGoues F, Copel M, Tromp R. 1990. Phys. Rev. B 42:11690
57. Xie YH, Gilmer GH, Roland C, Silverman PJ, Buratt SK. 1994. Phys. Rev. Lett. 73:3006
58. Beltz GE, Freund LB. 1993. Phys. Stat. Solidi B 180:303
59. Li J, Chiu Ch, Gao H. 1994. MRS Symp. Proc. 317:303
60. Grilhe J. 1993. Europhys. Lett. 23:141
61. Zimmerman J. Gao H. 1996. MRS Symp. Proc. 399:401
62. Frenkel J, Kontorova T. 1938. Phys. Z. SowjUn. 13:1
63. Nandedkar AS, Narayan J. 1989. Mater. Sci. Eng. A 113:51
64. Spencer BJ, Tersoff J. 1997. Phys. Rev. Lett. 79:4858
65. Floro JA, Chason E, Twesten RD, Hwang RQ, Freund LB. 1997. Phys. Rev. Lett. 79:3946
66. Chien NY, Gao H, Herrmann G, Barnett DM. 1996. Proc. R. Soc. London Ser. A 452:527