Microstructure and mechanical properties of TaN/TiN and TaWN/TiN superlattice films

Thin Solid Films

Volumn 370, Issue 1, 2000, Pages 45-49

  Junhua, Xu ^a   Geyang, Li ^a   Mingyuan, Gu ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; LATTICE CONSTANTS; LATTICE VIBRATIONS; MICROHARDNESS; MULTILAYERS; POLYCRYSTALLINE MATERIALS; STRAIN; SUPERLATTICES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

LATTICE MISMATCH; MICROHARDNESS TESTER; SUPERHARDNESS EFFECT; SUPERLATTICE FILMS;

THIN FILMS;

EID: 0033687224     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00940-8     Document Type: Article

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