Polycrystalline silicon thin-film transistors with location-controlled crystal grains fabricated by excimer laser crystallization

Applied Physics Letters

Volumn 91, Issue 20, 2007, Pages

  Tsai, Chun Chien ^a   Lee, Yao Jen ^b   Chiang, Ko Yu ^a   Wang, Jyh Liang ^a   Lee, I Che ^a   Chen, Hsu Hsin ^a   Wei, Kai Fang ^a   Chang, Ting Kuo ^a   Chen, Bo Ting ^a   Cheng, Huang Chung ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; EXCIMER LASERS; IRRADIATION; THIN FILM TRANSISTORS;

NANOMETER; SILICON CRYSTAL GRAINS; SUPERLATERAL GROWTH;

POLYSILICON;

EID: 36248981990     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2801525     Document Type: Article

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