Optical characterization procedure for large thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6617, Issue , 2007, Pages

  Trigo, Juan F ^a   Herrero, José ^a   Soriano, Leonardo ^b   Gutiérrez, María Teresa ^a  

^a CIEMAT   (Spain)

^b UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

2D metrology; Optical computing; Thin film in situ monitoring

Indexed keywords

CHARACTERIZATION; OPACITY; OPTICAL CONSTANTS; OPTICAL VARIABLES MEASUREMENT;

AUTOMATIC GLOBAL ANALYSIS SOFTWARE; GLOBAL MAPPING CAPABILITY;

THIN FILMS;

EID: 36248939249     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.726086     Document Type: Conference Paper

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