Sequential Bayesian estimation for tracking the composition of growing silicon-germanium alloys

Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences

Volumn 457, Issue 2009, 2001, Pages 1137-1151

  Marrs, Alan D ^a  

^a DEFENCE SCIENCE AND TECHNOLOGY LABORATORY   (United Kingdom)

Author keywords

Ellipsometry; Particle filter; Semiconductor characterization; Sequential Bayesian methods; State space model

Indexed keywords

EID: 57249107802     PISSN: 13645021     EISSN: None     Source Type: Journal    
DOI: 10.1098/rspa.2000.0711     Document Type: Article

References (11)

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