Spectroscopic ellipsometry in the infrared range

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 625-630

  Drévillon, Bernard ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

Infrared; Spectroscopic ellipsometry; Vibrational properties

Indexed keywords

AMORPHOUS SILICON; ELLIPSOMETRY; HYDROGEN; INFRARED SPECTROSCOPY; MONOLAYERS; SURFACE TREATMENT; THIN FILMS;

INFRARED SPECTROSCOPIC ELLIPSOMETRY (IR SE);

SEMICONDUCTING FILMS;

EID: 0031999919     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00968-1     Document Type: Article

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