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Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 406-415

Complementary in-situ and post-deposition diagnostics of thin film semiconductor structures

(1) Pickering, C a

a DEFENCE SCIENCE AND TECHNOLOGY LABORATORY (United Kingdom)

Author keywords

Control; Ellipsometry; Real time; Scattering; Si; Sige

Indexed keywords

ELLIPSOMETRY; LIGHT SCATTERING; PROCESS CONTROL; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR GROWTH; SEMICONDUCTOR LASERS; SPECTROPHOTOMETRY; THIN FILMS;

SPECTROSCOPIC ELLIPSOMETRY;

SEMICONDUCTING FILMS;

EID: 0031998635 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00855-9 Document Type: Article

Times cited : (19)

References (14)

1
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2
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3
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4
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- Carline, R.T.¹ Russell, J.² Hosea, J.³ Thomas, P.J.S.⁴ Pickering, C.⁵

5
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- Pickering, C.¹ Russell, J.² Nayar, V.³

6
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7
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- Aspnes, D.E.¹

8
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9
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10
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11
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12
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13
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14
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- Marrs, A.D.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.