In situ diagnostic methods for thin-film fabrication: Utilization of heat radiation and light scattering

Progress in Photovoltaics: Research and Applications

Volumn 12, Issue 2-3, 2004, Pages 219-234

  Sakurai, K ^a   Hunger, R ^b   Scheer, R ^c   Kaufmann, C A ^c   Yamada, A ^a   Baba, T ^d   Kimura, Y ^d   Matsubara, K ^a   Fons, P ^a   Nakanishi, H ^d   Niki, S ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^c Helmholtz Centre Berlin for Materials and Energy   (Germany)

^d TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

CIGS; Pyrometer; Roughness; Se overpressure; SLS; Solar cells; Spectroscopic light scattering; Thickness

Indexed keywords

COPPER; DEPOSITION; GALLIUM; HEAT RADIATION; LIGHT SCATTERING; PRECIPITATION (CHEMICAL); PYROMETERS; SELENIUM; SPECTROMETERS; SURFACE ROUGHNESS; TEMPERATURE;

COPPER INDIUM GALLIUM DISELINIDE; MONOCHROMATIC PYROMETER; SELENIUM OVERPRESSURE; SPECTROSCOPIC LIGHT SCATTERING; THICKNESS; VACUUM CHAMBER;

SOLAR CELLS;

DEPOSITION; FABRICATION; FILM; MANUFACTURE; PHOTOVOLTAIC SYSTEM;

EID: 1842781608     PISSN: 10627995     EISSN: None     Source Type: Journal    
DOI: 10.1002/pip.519     Document Type: Article

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