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Surface and Interface Analysis

Volumn 31, Issue 10, 2001, Pages 927-937

Spectroscopic ellipsometry for monitoring and control of surfaces, thin layers and interfaces

(1) Pickering, C a

a QINETIQ (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; EPITAXIAL GROWTH; GALLIUM NITRIDE; MULTILAYERS; PROCESS CONTROL; REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS; SURFACE ROUGHNESS;

SILICON EPITAXIAL SURFACES;

INTERFACES (MATERIALS);

EID: 0035475958 PISSN: 01422421 EISSN: None Source Type: Journal
DOI: 10.1002/sia.1130 Document Type: Article

Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.