Use of information on the manufacture of samples for the optical characterization of multilayers through a global optimization

Applied Optics

Volumn 42, Issue 7, 2003, Pages 1325-1329

  Sancho Parramon, Jordi ^a   Ferré Borrull, Josep ^a   Bosch, Salvador ^a   Ferrara, Maria Christina ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b Centro Ricerche Brindisi   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

GLOBAL OPTIMIZATION; INFORMATION USE; MULTILAYERS; OPTICAL SYSTEMS; REFRACTIVE INDEX; SPECTROPHOTOMETRY; THIN FILMS;

OPTICAL CHARACTERIZATION;

OPTICAL FILMS;

EID: 0042977703     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.001325     Document Type: Article

References (6)

1. S. Bosch, J. Ferre-Borull, and J. Sancho-Parramon, “A general purpose software for optical characterisation of thin films: Specific features for microelectronic applications,” Solid-State Electron. 45, 703-709 (2001).
2. H. A. Macleod, Thin Film Optical Filters (Wiley, New York, 1976).
3. S. Bosch, N. Leinfellner, E. Quesnel, A. Duparre, J. Ferre-Borrull, S. Guenster, and D. Ristau, “New procedure for the optical characterization of high-quality thin films,” in Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, G. A. Al-Jumaily, A. Duparre, and B. Singh, eds., Proc. SPIE 4099, 124-130 (2000).
4. W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flan-nery, Numerical Recipes in C (Cambridge University Press, New York, 1992).
5. M. C. Ferrara, S. Mazzarelli, J. Sancho-Parramon, and S. Bosch. “Sol-gel process for the production of large area coatings,” presented at the III Workshop Italiano Sol-Gel, Trento, Italy, 13-14 June 2002.
6. C. J. Brinker and G. W. Scherer, The Physics and the Chemistry of Sol-gel Processing (Academic, New York, 1990).