SCOPUS 정보 검색 플랫폼

Volumn 45, Issue 5, 2001, Pages 703-709

A general-purpose software for optical characterization of thin films: Specific features for microelectronic applications

(3) Bosch, S a Ferre Borrull J a Sancho Parramon, J a

a UNIVERSITY OF BARCELONA (Spain)

Author keywords

Optical characterization of materials; Thin films

Indexed keywords

COMPOSITION EFFECTS; COMPUTER SOFTWARE; CRYSTAL MICROSTRUCTURE; ELLIPSOMETRY; MICROELECTRONICS; SEMICONDUCTOR DEVICE MODELS; SPECTROPHOTOMETERS; THIN FILMS;

COMPUTER AIDED OPTICAL CHARACTERIZATION;

SEMICONDUCTING FILMS;

EID: 0035335261 PISSN: 00381101 EISSN: None Source Type: Journal
DOI: 10.1016/S0038-1101(01)00092-2 Document Type: Article

Times cited : (47)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.