Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions

Applied Physics Letters

Volumn 91, Issue 1, 2007, Pages

  Verd, J ^a   Uranga, A ^a   Abadal, G ^a   Teva, J ^a   Torres, F ^a   Prez Murano F ^b   Fraxedas, J ^c   Esteve, J ^b   Barniol, N ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^c INSTITUT DE CIÈNCIA DE MATERIALS DE BARCELONA ICMAB CSIC   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CONVENTIONAL TECHNOLOGY; MASS RESOLUTION; MONOLITHIC MASS SENSOR; SUBMICROMETER SCALE CANTILEVERS;

CANTILEVER BEAMS; CMOS INTEGRATED CIRCUITS; ELECTROSTATICS;

IMAGE SENSORS;

EID: 36048944300     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2753120     Document Type: Article

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