High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn , Issue , 2005, Pages 4209-4212

  Verd, Jaume ^a   Abadal, Gabriel ^a   Teva, Jordi ^a   Uranga, Arantxa ^a   Barniol, Núria ^a   Esteve, Jaume ^b   Duch, Marta ^b   Pérez Murano, Francesc ^b  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE READOUT; DRIVER SYSTEMS; HIGH-SENSITIVITY; PARASITIC CAPACITANCE; STANDARD TECHNOLOGY; SUBMICROMETER;

ATOMIC FORCE MICROSCOPY; CAPACITANCE; NANOCANTILEVERS;

READOUT SYSTEMS;

EID: 67649099725     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISCAS.2005.1465559     Document Type: Conference Paper

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