Focused-ion-beam-assisted tuning of thin-film bulk acoustic wave resonators (FBARs)

Journal of Micromechanics and Microengineering

Volumn 17, Issue 11, 2007, Pages 2380-2389

  Campanella, Humberto ^a,c   Hernández Ramírez, Francisco ^b   Romano Rodríguez, Albert ^b   Montserrat, Josep ^a   Uranga, Arantxa ^c   Barniol, Nuria ^c   Esteve, Jaume ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

^c UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; DEPOSITION; FOCUSED ION BEAMS; MICROMETERS; PHYSICAL PROPERTIES; THIN FILMS; TUNING;

FREQUENCY TUNING THIN FILM BULK ACOUSTIC RESONATORS (FBAR); LOCALIZED COMPOSITE; MICROMETER DIMENSIONS; TUNING MASS;

RESONATORS;

EID: 35748973553     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/11/027     Document Type: Article

References (28)

1. Lakin K M and Wang J S 1981 Acoustic bulk wave composite resonators Appl. Phys. Lett. 38 125-7
2. Mason W P 1948 Electromechanical Transducers and Wave Filters (Princeton, NJ: Van Nostrand)
3. Pan W, Soussan P, Nauwelaers B and Tilmans H A C 2006 A surface micromachined electrostatically tunable film bulk acoustic resonator Sensors Actuators A 126 436-46
4. Lancaster M J, Powell J and Porch A 1998 Thin-film ferroelectric microwave devices Supercond. Sci. Technol. 11 1323-34
5. Ella J 1998 Device incorporating a tunable thin film bulk acoustic resonator for performing amplitude and phase modulation US Patent 5714917
6. Korden C, Ostertag T and Ruile W 2005 Component having an acoustically active material for tuning during operation US Patent 6847271
7. Kafumbe S M M, Burdess J S and Harris A J 2005 Frequency adjustment of microelectromechanical cantilevers using electrostatic pull down J. Micromech. Microeng. 15 1033-9
8. Kozinsky I, Postma H W Ch, Bargatin I and Roukes M L 2006 Tuning nonlinearity, dynamic range, and frequency of nanomechanical resonators Appl. Phys. Lett. 88 253101
9. Maglione M, Zhu W and Wang Z H 2005 Evidence of a strong magnetic effect on the impedance of integrated piezoelectric resonators Appl. Phys. Lett. 87 092904
10. Ruby R C and Merchant P P 1996 Tunable thin film acoustic resonators and method for making the same US Patent 5587620
11. Ylilammi M A 2000 Method for performing on-wafer tuning of thin film bulk acoustic wave resonators (FBARS) US Patent 6051907
12. Dragoman M, Muller A, Neculoiu D, Vasilache D, Konstantinidis G, Grenier K, Dubuc D, Bary L, Plana R and Flahautn E 2006 High performance thin film bulk acoustic resonator covered with carbon nanotubes Appl. Phys. Lett. 89 143122
13. Sauerbrey G Z 1959 Verwendung von Schwingquarzen zur Wägung dünner Schichten und Microwägung Z. Phys. 155 206-22
14. Lostis P 1959 Rev. Opt., Theor. Instrum. 38 1
15. Chiao M and Lin L 2004 Post-packaging frequency tuning of microresonators by pulsed laser deposition J. Micromech. Microeng. 14 1742-7
16. Fujii T, Iwasaki K, Munekane M, Takeuchi T, Hasuda M, Asahata T, Kiyohara M, Kogure T, Kijima Y and Kaito T 2005 A nanofactory by focused ion beam J. Micromech. Microeng. 15 S286-91
17. Reyntjens S and Puers R 2000 Focused ion beam induced deposition: fabrication of three-dimensional microstructures and Young's modulus of the deposited material J. Micromech. Microeng. 10 181-8
18. Reyntjens S and Puers R 2001 A review of focused ion beam applications in microsystem technology J. Micromech. Microeng. 11 287-300
19. Pruessner M W, Siwak N, Amarnath K, Kanakaraju S, Chuang W-H and Ghodssi R 2006 End-coupled optical waveguide MEMS devices in the indium phosphide material system J. Micromech. Microeng. 16 832-42
20. Hernndez-Ramírez F et al 2006 Fabrication and electrical characterization of circuits based on individual tin oxide nanowires Nanotechnology 17 5577-83
21. Campanella H, Esteve J, Montserrat J, Uranga A, Abadal G, Barniol N and Romano-Rodríguez A 2006 Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators Appl. Phys. Lett. 89 033507
22. Campanella H, Uranga A, Romano-Rodríguez A, Montserrat J, Abadal G, Barniol N and Esteve J 2007 Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): area and mass location aspects Sensors Actuators A at press (doi:10.1016/j.sna.2007.05.004)
23. Vil A, Hernndez-Ramírez F, Rodríguez J, Casals O, Romano-Rodríguez A, Morante J R and Abid M 2006 Fabrication of metallic contacts to nanometer-sized materials using a focused ion beam (FIB) Mater. Sci. Eng. C 26 1063-6
24. Mulders H (FEI Company) private communication
25. Forsen E et al 2005 Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry Appl. Phys. Lett. 87 043507
26. Ekinci K L, Huang X M H and Roukes M L 2004 Ultrasensitive nanoelectromechanical mass detection Appl. Phys. Lett. 84 4469-71
27. Ilic B, Craighead H G, Krylov S, Senaratne W, Ober C and Neuzil P 2004 Attogram detection using nanoelectromechanical oscillators J. Appl. Phys. 95 3694-703
28. Enderling S, Hedley J, Jiang L, Cheung R, Zorman C, Mehregany M and Walton A J 2007 Characterization of frequency tuning using focused ion beam platinum deposition J. Micromech. Microeng. 17 213-9