A surface micromachined electrostatically tunable film bulk acoustic resonator

Sensors and Actuators, A: Physical

Volumn 126, Issue 2, 2006, Pages 436-446

  Pan, Wanling ^a,b   Soussan, Philippe ^a   Nauwelaers, Bart ^a,b   Tilmans, Harrie A C ^a,b,c,d,e  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c IEEE

^d International Microelectronics and Packaging Society (IMAPS)

^e European Microwave Association

Author keywords

Electrostatic actuation; FBAR; Frequency tuning; Integration

Indexed keywords

BULK ACOUSTIC WAVE (BAW); ELECTROSTATIC ACTUATION; FBAR; FREQUENCY TUNING; MEMS ACTUATION;

ACOUSTIC WAVES; ELECTROSTATIC ACTUATORS; FABRICATION; SEMICONDUCTING FILMS; STRUCTURAL ANALYSIS;

ACOUSTIC RESONATORS;

EID: 31544473117     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.10.055     Document Type: Article

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