Morphology and electric conductance of ultra-thin Cr contacts on 6H-SiC(0001): AFM and current-sensing AFM study

Vacuum

Volumn 82, Issue 4, 2007, Pages 364-371

  Mazur, P ^a   Zuber, S ^a   Grodzicki, M ^a   Ciszewski, A ^a  

^a UNIVERSITY OF WROC AW   (Poland)

Author keywords

Chromium; Metal contacts; Silicon carbide 6H SIC; Thin film

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CHROMIUM; ELECTRIC CONDUCTANCE; SILICON CARBIDE; SINGLE CRYSTALS; TOPOGRAPHY; ULTRAHIGH VACUUM;

ANNEALING TEMPERATURE; METAL CONTACTS; STRANSKI KRASTANOV GROWTH MODE; TUBULAR FLOW REACTOR;

THIN FILMS;

EID: 35548966056     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.07.047     Document Type: Article

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