Study of the early stages of Cu/6H-SiC(000-1) interface formation

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 1209-1212

  Dontas, I ^a   Ladas, S ^a   Kennou, S ^a  

^a UNIVERSITY OF PATRAS   (Greece)

Author keywords

Carbides; Copper; Work function; X ray photoelectron spectroscopy

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; INTERFACES (MATERIALS); LOW ENERGY ELECTRON DIFFRACTION; MONOLAYERS; SILICON CARBIDE; SINGLE CRYSTALS; X RAY PHOTOELECTRON SPECTROSCOPY;

SCHOTTKY BARRIERS;

COPPER;

DIAMOND;

EID: 0037852196     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00397-7     Document Type: Article

References (36)

1. Palmour, J. W., Edmond, J. A., Kong, H. S., & Carter, C. H. (1993). Physica B. 185 461.
2. Morkoc, H., Strite, S., Gao, G. B., Lin, M. E., Sverdlov, B., & Burns, M. (1994). J. Appl. Phys.. 76(3), 1363.
3. Carter, C. H. Jr., Tsvetkov, V. F., & Glass, R. C. et al. (1999). Mater. Sci. Eng. B. 61-62 1.
4. Siergiej, R. R., Clarke, R. C., & Sriram, S. et al. (1999). Mater. Sci. Eng. B. 61-62 9.
5. Rottner, K., Frischholz, M., & Myrtveit, T. et al. (1999). Mater. Sci. Eng. B. 61-62 330.
6. Chalker, P. R. (1999). Thin Solid Films. 343-344 616.
7. Mead, C. A., & Spitzer, W. G. (1964). Phys. Rev. A. 134 713.
8. Hagen, S. H. (1968). J. Appl. Phys.. 39 1458.
9. Wu, S. Y., & Campbell, R. B. (1974). Solid-State Electron.. 17 683.
10. Waldrop, J. R., Grant, R. W., Wang, Y. C., & Davis, R. F. (1992). J. Appl. Phys.. 72(10), 4757.
11. Lundberg, N., & Ostling, M. (1993). Appl. Phys. Lett.. 63(22), 3069.
12. Kennou, S. (1995). J. Appl. Phys.. 78(1), 58.
13. Porter, L. M., & Davis, R. F. (1995). Mater. Sci. Eng. B. 34 83.
14. Li, L., & Tsong, I. S. T. (1996). Surf. Sci.. 364 54.
15. Itoh, A., & Matsunami, H. (1997). Phys. Stat. Sol. (a). 162 389.
16. Kennou, S., Siokou, A., Dontas, I., & Ladas, S. (1997). Diamond Relat. Mat.. 6 1424.
17. Bozack, M. J. (1997). Phys. Stat. Sol. (b). 202 549.
18. Shalish, I., & Shapira, Y. (2000). IEEE Electron. Device Lett.. 21(12), 581.
19. Dontas, I., & Kennou, S. (2001). Diamond Relat. Mat.. 10 13.
20. Roccaforte, F., La Via, F., Raineri, V., Calcagno, L., & Musumeci, P. (2001). Appl. Surf. Sci.. 184 295.
21. Schroeter, B., Komlev, K., & Richter, W. (2002). Mater. Sci. Eng. B. 88 259.
22. La Via, F., Roccaforte, F., Makhtari, A., Raineri, V., Musumeci, P., & Calcagno, L. (2002). Microelectron. Eng.. 60 269.
23. van Elsbergen, V., Kampen, T. U., & Monch, W. (1996). J. Appl. Phys.. 79(1), 316.
24. Marinova, Ts ., Krastev, V., Hallin, C., Yakimova, R., & Janzen, E. (1996). Appl. Surf. Sci.. 99 119.
25. Bhanumurthy, K., & Schmid-Fetzer, R. (2001). Composites: Part A. 32 569.
26. Nishimori, K., Tokutaka, H., Nakanishi, S., Kishida, S., & Ishihara, N. (1989). Jpn. J. Appl. Phys. Lett.. 28(8), L1345.
27. Wang, Z., & Wynblatt, P. (1998). J. Mater. Sci.. 33 1177.
28. Iwami, M., Hirai, M., & Kusaka, M. et al. (2000). Mater. Sci. Forum. 338-342 419.
29. Suezaki, T., Kawahito, K., Hatayama, T., Uraoka, Y., & Fuyuki, T. (2001). Jpn. J. Appl. Phys. Lett. Part 2. 40(1A/B), L43.
30. An, Z., Hirai, M., Kusaka, M., Saitoh, T., & Iwami, M. (2001). Jpn. J. Appl. Phys. Part 1. 40(3B), 1927.
31. An, Z., Ohi, A., Hirai, M., Kusaka, M., & Iwami, M. (2001). Surf. Sci.. 493 182.
32. Cree Research Inc., 2810 Meridian Parkway, Suite 176, Durham, NC 27713 (1995)
33. Tanuma, S., Powell, C. J., & Penn, D. R. (1993). Surf. Interface Anal.. 21 165.
34. Sotiropoulou, D., & Ladas, S. (2000). Surf. Sci.. 452 58.
35. Kakanakova-Georgieva, A., Marinova, Ts ., Noblanc, O., Arnodo, C., Cassette, S., & Brylinski, C. (1999). Thin Solid Films. 343-344 637.
36. Haas, G. A., & Thomas, R. E. (1977). J. Appl. Phys.. 48 86.