X-ray photoelectron spectroscopy study of ZrO2/TiO 2/Si stack

Applied Physics Letters

Volumn 91, Issue 17, 2007, Pages

  Zhu, L Q ^a   Zhang, L D ^a   Fang, Q ^b  

^a INSTITUTE OF SOLID STATE PHYSICS   (China)

^b UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

PHASE INTERFACES; RAPID THERMAL ANNEALING; SURFACE CHEMISTRY; TITANIUM DIOXIDE; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIA;

HIGH DIELECTRIC CONSTANT; INTERFACIAL PROPERTIES; PHASE REACTIONS;

STACKING FAULTS;

EID: 35548936042     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2795331     Document Type: Article

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