메뉴 건너뛰기




Volumn 28, Issue , 2001, Pages 149-201

Molecular dynamics simulations of ion-surface interactions with applications to plasma processing

Author keywords

[No Author keywords available]

Indexed keywords


EID: 35448953104     PISSN: 00652377     EISSN: None     Source Type: Book Series    
DOI: 10.1016/s0065-2377(01)28006-5     Document Type: Review
Times cited : (2)

References (53)
  • 1
    • 85120093782 scopus 로고    scopus 로고
    • Molecular Dynamics Simulations of Plasma-Surface Chemistry
    • C.F Abrams Molecular Dynamics Simulations of Plasma-Surface Chemistry Ph.D. dissertation 2000 University of California Berkeley
    • (2000)
    • Abrams, C.F1
  • 8
    • 0003451443 scopus 로고
    • Computer Simulation of Liquids
    • M.P Allen D.J Tildesley Computer Simulation of Liquids 1987 Oxford University Press New York
    • (1987)
    • Allen, M.P1    Tildesley, D.J2
  • 10
    • 85120140308 scopus 로고
    • Atomistic Simulations of Plasma-Surface Interactions
    • M.E Barone Atomistic Simulations of Plasma-Surface Interactions Ph.D. dissertation 1995 University of California Berkeley
    • (1995)
    • Barone, M.E1
  • 15
  • 17
    • 85120129587 scopus 로고
    • F.F Chen 2nd ed Introduction to Plasma Physics and Controlled Fusion Vol. 1 1984 Plenum Press New York Plasma Physics
    • (1984)
    • Chen, F.F1
  • 24
    • 0003576136 scopus 로고
    • Molecular Dynamics Simulation
    • J.M Haile Molecular Dynamics Simulation 1992 John Wiley and Sons New York
    • (1992)
    • Haile, J.M1
  • 30
    • 85120101974 scopus 로고    scopus 로고
    • Computer Simulations of Plasma-Surface Chemistry
    • B.A Helmer Computer Simulations of Plasma-Surface Chemistry Ph.D. dissertation 1998 University of California Berkeley
    • (1998)
    • Helmer, B.A1
  • 36
    • 0003730831 scopus 로고
    • Principles of Plasma Discharges and Materials Processing
    • M.A Lieberman A.J Lichtenberg Principles of Plasma Discharges and Materials Processing 1994 John Wiley and Sons
    • (1994)
    • Lieberman, M.A1    Lichtenberg, A.J2
  • 38
    • 85120104452 scopus 로고
    • D.E Post R Behrisch Physics of Plasma-Wall Interactions in Controlled Fusion NATO ASI Series B 1986 Plenum Press New York
    • (1986)
  • 39
    • 0003705747 scopus 로고
    • The Art of Molecular Dynamics Simulation
    • D.C Rapaport The Art of Molecular Dynamics Simulation 1995 Cambridge University Press Cambridge
    • (1995)
    • Rapaport, D.C1
  • 40
    • 3643090763 scopus 로고
    • P Sigmund Phys. Rev. 184 2 1969 383 416
    • (1969) Phys. Rev. , vol.184 , Issue.2 , pp. 383-416
    • Sigmund, P1
  • 46
    • 7544236735 scopus 로고
    • J Tersoff Phys. Rev. B 38 14 1988 9902 9905
    • (1988) Phys. Rev. B , vol.38 , Issue.14 , pp. 9902-9905
    • Tersoff, J1
  • 47
    • 27744577658 scopus 로고
    • J Tersoff Phys. Rev. B 39 8 1989 5566 5568
    • (1989) Phys. Rev. B , vol.39 , Issue.8 , pp. 5566-5568
    • Tersoff, J1
  • 51
    • 85120138834 scopus 로고    scopus 로고
    • Surface Evolution during Integrated Circuit Processing
    • M.A Vyvoda Surface Evolution during Integrated Circuit Processing Ph.D. thesis 1999 University of California Berkeley
    • (1999)
    • Vyvoda, M.A1
  • 53
    • 0003699181 scopus 로고    scopus 로고
    • Silicon Processing for the VLSI Era
    • S Wolf R.N Tauber Silicon Processing for the VLSI Era 2nd ed. Vol. 1. Process Technology 2000 Lattice Press Sunset Beach, CA
    • (2000)
    • Wolf, S1    Tauber, R.N2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.