-
1
-
-
85120093782
-
Molecular Dynamics Simulations of Plasma-Surface Chemistry
-
C.F Abrams Molecular Dynamics Simulations of Plasma-Surface Chemistry Ph.D. dissertation 2000 University of California Berkeley
-
(2000)
-
-
Abrams, C.F1
-
8
-
-
0003451443
-
Computer Simulation of Liquids
-
M.P Allen D.J Tildesley Computer Simulation of Liquids 1987 Oxford University Press New York
-
(1987)
-
-
Allen, M.P1
Tildesley, D.J2
-
10
-
-
85120140308
-
Atomistic Simulations of Plasma-Surface Interactions
-
M.E Barone Atomistic Simulations of Plasma-Surface Interactions Ph.D. dissertation 1995 University of California Berkeley
-
(1995)
-
-
Barone, M.E1
-
15
-
-
33644817086
-
-
D.W Brenner Phys. Rev. B 42 15 1990 9458 9471
-
(1990)
Phys. Rev. B
, vol.42
, Issue.15
, pp. 9458-9471
-
-
Brenner, D.W1
-
17
-
-
85120129587
-
-
F.F Chen 2nd ed Introduction to Plasma Physics and Controlled Fusion Vol. 1 1984 Plenum Press New York Plasma Physics
-
(1984)
-
-
Chen, F.F1
-
22
-
-
0030134690
-
-
A Galijatovic A Darcy B Acree G Fullbright R McCormac B Green K.D Krantzman T.A Schoolcraft J. Phys. Chem. 100 1996 9471 9479
-
(1996)
J. Phys. Chem.
, vol.100
, pp. 9471-9479
-
-
Galijatovic, A1
Darcy, A2
Acree, B3
Fullbright, G4
McCormac, R5
Green, B6
Krantzman, K.D7
Schoolcraft, T.A8
-
24
-
-
0003576136
-
Molecular Dynamics Simulation
-
J.M Haile Molecular Dynamics Simulation 1992 John Wiley and Sons New York
-
(1992)
-
-
Haile, J.M1
-
30
-
-
85120101974
-
Computer Simulations of Plasma-Surface Chemistry
-
B.A Helmer Computer Simulations of Plasma-Surface Chemistry Ph.D. dissertation 1998 University of California Berkeley
-
(1998)
-
-
Helmer, B.A1
-
36
-
-
0003730831
-
Principles of Plasma Discharges and Materials Processing
-
M.A Lieberman A.J Lichtenberg Principles of Plasma Discharges and Materials Processing 1994 John Wiley and Sons
-
(1994)
-
-
Lieberman, M.A1
Lichtenberg, A.J2
-
38
-
-
85120104452
-
-
D.E Post R Behrisch Physics of Plasma-Wall Interactions in Controlled Fusion NATO ASI Series B 1986 Plenum Press New York
-
(1986)
-
-
-
39
-
-
0003705747
-
The Art of Molecular Dynamics Simulation
-
D.C Rapaport The Art of Molecular Dynamics Simulation 1995 Cambridge University Press Cambridge
-
(1995)
-
-
Rapaport, D.C1
-
40
-
-
3643090763
-
-
P Sigmund Phys. Rev. 184 2 1969 383 416
-
(1969)
Phys. Rev.
, vol.184
, Issue.2
, pp. 383-416
-
-
Sigmund, P1
-
46
-
-
7544236735
-
-
J Tersoff Phys. Rev. B 38 14 1988 9902 9905
-
(1988)
Phys. Rev. B
, vol.38
, Issue.14
, pp. 9902-9905
-
-
Tersoff, J1
-
47
-
-
27744577658
-
-
J Tersoff Phys. Rev. B 39 8 1989 5566 5568
-
(1989)
Phys. Rev. B
, vol.39
, Issue.8
, pp. 5566-5568
-
-
Tersoff, J1
-
51
-
-
85120138834
-
Surface Evolution during Integrated Circuit Processing
-
M.A Vyvoda Surface Evolution during Integrated Circuit Processing Ph.D. thesis 1999 University of California Berkeley
-
(1999)
-
-
Vyvoda, M.A1
-
53
-
-
0003699181
-
Silicon Processing for the VLSI Era
-
S Wolf R.N Tauber Silicon Processing for the VLSI Era 2nd ed. Vol. 1. Process Technology 2000 Lattice Press Sunset Beach, CA
-
(2000)
-
-
Wolf, S1
Tauber, R.N2
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