Molecular dynamics simulations of reactions of hyperthermal fluorine atoms with fluorosilyl adsorbates on the Si{100}-(2 x 1) surface

Journal of Physical Chemistry

Volumn 100, Issue 22, 1996, Pages 9471-9479

  Galijatovic, Alema ^a   Darcy, Adam ^a   Acree, Ben ^a   Fullbright, George ^a   McCormac, Rupert ^b   Green, Bryan ^b   Krantzman, Kristin D ^a   Schoolcraft, Tracy A ^b  

^a School of Business   (United States)

^b SHIPPENSBURG UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; CHEMICAL REACTIONS; ETCHING; MOLECULAR DYNAMICS; SILICON COMPOUNDS; SIMULATION; SURFACE PHENOMENA;

FLUOROSILYL ADSORBATES; HYPERTHERMAL FLUORINE ATOMS; MECHANISM FORMATION;

FLUORINE;

EID: 0030134690     PISSN: 00223654     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp960058t     Document Type: Article

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