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Volumn 308, Issue 2, 2007, Pages 424-429
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Thickness-dependent dielectric properties of nanoscale Pt/(Pb,Ba)ZrO3/BaPbO3 capacitors
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Author keywords
A1. Crystal structure; A1. Diffusion; A1. Interfaces; B2. Ferroelectric materials
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Indexed keywords
CRYSTAL STRUCTURE;
DIELECTRIC PROPERTIES;
DIFFUSION;
FERROELECTRIC MATERIALS;
FILM THICKNESS;
GRAIN BOUNDARIES;
GRAIN SIZE AND SHAPE;
MAGNETRON SPUTTERING;
THIN FILMS;
ANTIFERROELECTRIC LAYER;
DEAD LAYER;
LEAD BARIUM ZIRCONATE (PBZ) THIN FILMS;
RF-MAGNETRON SPUTTERING;
CAPACITORS;
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EID: 35348911873
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcrysgro.2007.08.029 Document Type: Article |
Times cited : (7)
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References (26)
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