Electric tunable behavior of sputtered lead barium zirconate thin films

Applied Physics Letters

Volumn 90, Issue 7, 2007, Pages

  Wu, Lin Jung ^a   Wu, Jenn Ming ^a   Huang, Hsin Erh ^b   Bor, Hui Yun ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; DIELECTRIC MATERIALS; ELECTROMECHANICAL DEVICES; MAGNETRON SPUTTERING; PEROVSKITE; SEMICONDUCTING LEAD COMPOUNDS; SILICON;

FREQUENCY-AGILE APPLICATIONS; LEAD BARIUM ZIRCONATE (PBZ) FILMS; OXYGEN MIXING RATIO (OMR);

THIN FILMS;

EID: 33847170531     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2472564     Document Type: Article

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