Optimum lifetime structuring in silicon power diodes by means of various irradiation techniques

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 186, Issue 1-4, 2002, Pages 414-418

  Hazdra, P ^a   Vobecky J ^a   Brand, K ^b  

^a CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Electron; Helium; Hydrogen; Irradiation; Lifetime control; Silicon

Indexed keywords

ALPHA PARTICLES; COMPUTER SIMULATION; HELIUM; HYDROGEN; IRRADIATION; NUCLEAR ENERGY; OPTIMIZATION; PARAMETER ESTIMATION; PROTONS; SEMICONDUCTING SILICON;

LOCAL LIFETIME CONTROL (LLC);

SEMICONDUCTOR DIODES;

EID: 0036136214     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00898-9     Document Type: Article

References (5)