Ion transmission through nano-apertures

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 752-755

  Taylor, M L ^a   Franich, R D ^a   Alves, A ^a   Reichart, P ^b   Jamieson, D N ^b   Johnston, P N ^a  

^a RMIT UNIVERSITY   (Australia)

^b UNIVERSITY OF MELBOURNE   (Australia)

Author keywords

High aspect ratio structures; Ion beam analysis; Ion beam lithography; Monte Carlo modelling; Nano stencil; Nuclear microprobe

Indexed keywords

ASPECT RATIO; DOPING (ADDITIVES); MONTE CARLO METHODS; PROBABILITY; SCATTERING; SUBSTRATES;

HIGH ASPECT RATIO STRUCTURES; ION BEAM ANALYSIS; MONTE CARLO MODELING; NANO STENCIL; NUCLEAR MICROPROBES;

ION BEAMS;

EID: 33745840521     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.03.132     Document Type: Article

References (13)

1. Schenkel T., Persaud A., Park S.J., Nilsson J., Bokor J., Liddle J.A., Keller R., Schneider D.H., Cheng D.W., and Humphries D.E. J. Appl. Phys. 94 (2003) 7017
2. Schenkel T., Persaud A., Park S.J., Meijer J., Kingsley J.R., MacDonald J.W., Holder J.P., Bokor J., and Schneider D.H. J. Vac. Sci. Tech. B 20 (2002) 2819
3. Schenkel T., Meijer J., Persaud A., MacDonald J.W., Holder J.P., and Schneider D.H. SPIE Proc. San Jose (USA) 4656 January (2002) 10
4. Alves A., Hearne S.M., Reichart P., Siegele R., Jamieson D.N., and Johnston P.N. Ion beam lithography with single ions. SPIE Proc. 5650 (2005) 381
5. A. Alves, P. Reichart, R. Siegele, P.N. Johnston, D.N. Jamieson, Nucl. Instr. and Meth. B, these Proceedings, doi:10.1016/j.nimb.2006.03.128.
6. Grabiec P., Radojewski J., Zaborowski M., Domanski K., Schenkel T., and Rangelow I.W. J. Vac. Sci. Tech. B 22 (2004) 16
7. Lehrer C., Frey L., Peterson S., Sulzbach Th., Ohlsson O., Dziomba Th., Danzebrink H.U., and Russel H. Microelectron. Eng. 57-58 (2001) 721
8. Dziomba Th., Sulzbach Th., Ohlsson O., Lehrer C., Frey L., and Danzebrink H.U. SXM-3 Proc. 5-6 (1999) 486
9. Biersack J.P., and Littmark U. The Stopping and Range of Ions in Solids (1985), Pergamon, New York
10. Franich R.D., Johnston P.N., Bubb I.F., Dytlewski N., and Cohen D.D. Nucl. Instr. and Meth. B 190 (2002) 252
11. Franich R.D., Johnston P.N., and Bubb I.F. Nucl. Instr. and Meth. B 219-220 (2004) 87
12. Luthi R., Schittler R.R., Brugger J., Vettiger P., Welland M.E., and Gimzewski J.K. App. Phys. Lett. 75 (1999) 1314
13. Adamczewski J., Meijer J., Stephan A., Bukow H.H., and Rolfs C. Nucl. Instr. and Meth. B 114 (1996) 172