Wet and vapor etching of tracks produced in SiO2 by Ti ion irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 593-596

  Bergamini, F ^a,b   Bianconi, M ^a,b   Cristiani, S ^a  

^a CNR   (Italy)

^b Laboratory MIST E R   (Italy)

Author keywords

Ion tracks; Nano pores; Silicon dioxide

Indexed keywords

ACTIVATION ENERGY; CORRELATION METHODS; NANOSTRUCTURED MATERIALS; SILICA; TITANIUM COMPOUNDS; WET ETCHING;

ION TRACKS; NANO-PORES; TRACK DEVELOPMENT;

IONS;

EID: 33947699765     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.045     Document Type: Article

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