Transmission electron microscopy and atom probe specimen preparation from mechanically alloyed powder using the focused ion-beam lift-out technique

Journal of Electron Microscopy

Volumn 56, Issue 2, 2007, Pages 43-49

  Choi, Pyuck Pa ^a   Kwon, Young Soon ^b   Kim, Ji Soon ^b   Al Kassab, Tala'at ^c  

^a Korea Institute of Science and Technology   (South Korea)

^b University of Ulsan   (South Korea)

^c UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

Atom probe; Field ion microscopy; Focused ion beam; In situ lift out; Powder materials; Transmission electron microscopy

Indexed keywords

ATOMS; COPPER ALLOYS; GALLIUM; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; ION IMPLANTATION; MILLING (MACHINING); PROBES; SPECIMEN PREPARATION; TIN ALLOYS; TITANIUM ALLOYS;

ATOM PROBE; ATOM PROBE FIELD-ION MICROSCOPIES; ATOM-PROBE FIELD ION MICROSCOPY; FIELD ION MICROSCOPY; FOCUSED IONS BEAMS; IN-SITU LIFT-OUT; LIFT OUTS; LIFT-OUT TECHNIQUES; MECHANICALLY ALLOYED POWDER; POWDER MATERIAL;

FOCUSED ION BEAMS;

EID: 35348876623     PISSN: 00220744     EISSN: 14779986     Source Type: Journal    
DOI: 10.1093/jmicro/dfm003     Document Type: Article

References (27)

1. Suryanarayana C (2001) Mechanical alloying and milling. Progr. Mater. Sci. 46: 1-184.
2. Zhang D L (2004) Processing of advanced materials using high-energy mechanical milling. Progr. Mater. Sci. 49: 537-560.
3. Kawamura Y, Kato H, Inoue A, and Masumoto T (1995) Full strength compacts by extrusion of glassy metal powder at the supercooled liquid state. Appl. Phys. Lett. 67: 2008-2010.
4. Lee M H, Bae D H, Kim W T, Kim D H, Rozhkova E, Wheelock P B, and Sordelet D J (2003) Synthesis of Ni-based bulk amorphous alloys by warm extrusion of amorphous powders. J. Non-Cryst. Solids 315: 89-96.
5. Kim H J, Lee J K, Shin S Y, Jeong H G, Kim D H, Bae J C (2004) Cu-based bulk amorphous alloys prepared by consolidation of amorphous powders in the supercooled liquid region. Intermetallics 12: 1109-1113.
6. Overwijk M H F, Van Den Heuvel F C, and Bulle-Lieuwma C W T (1993) Novel scheme for the preparation of transmission electron microscopy specimens with a focused ion beam. J. Vac. Sci. Technol. B 11(6): 2021-2024.
7. Stevie F A, Shane T C, Kahora P M, Hull R, Bahnck D, Kannan V C, and David E (1995) Applications of focused ion beams in microelectronics production, design and development. Surf. Interface Anal. 23: 61-68.
8. Giannuzzi L A, Drown J L, Brown S R, Irwin R B, and Stevie F A (1997) Focused ion beam milling and micromanipulation lift-out for site specific cross-section TEM specimen. Preparation. Mater. Res. Soc. Symp. Proc. 480: 19-27.
9. Giannuzzi L A, Drown J L, Brown S R, Irwin R B, and Stevie F A (1998) Applications of the FIB lift-out technique for TEM specimen preparation. Microsc. Res. Tech. 41: 285-290.
10. Giannuzzi L A and Stevie F A (1999) A review of focused ion beam milling techniques for TEM specimen preparation. Micron 30: 197-204.
11. Stevie F A, Vartuli C B, Giannuzzi L A, Shofner T L, Brown S R, Rossie B, Hillion F, Millis R H, Antoneel M, Irwin R B, and Purcell B M (2001) Application of focused ion beam lift-out specimen preparation to TEM, SEM, STEM, AES and SIMS analysis. Surf. Interface Anal. 31: 345-351.
12. Ishitani T, Umemura K, Ohnishi T, and Yaguchi T (2004) Improvements in performance of focused ion beam cross-sectioning: aspects of ion-sample interaction. J. Electron Microsc. 53: 443-449.
13. Kamino T, Yaguchi T, Kuroda Y, Ohnishi T, Ishitani T, Miyahara Y, and Horita Z (2004) Evaluation of TEM samples of an Mg-Al alloy prepared using FIB milling at the operating voltages of 10 kV and 40 kV. J. Electron Microsc. 53: 459-463.
14. Langrod R M and Clinton C (2004) In situ lift-out using a FIB-SEM system. Micron 35: 607-611.
15. Giannuzzi L A and Stevie F A (2005) Introduction to Focused Ion Beams, (Springer, New York).
16. Prenitzer B I, Giannuzzi L A, Newman K, Brown S R, Irwin R B, Shofner T L, and Stevie F A (1998) Transmission electron microscope specimen preparation of Zn powders using the focused ion beam lift-out technique. Metall. Mater. Trans. A 29: 2399-2406.
17. Lomness J K, Giannuzzi L A, and Hampton M D (2001) Site-specific transmission electron microscope characterization of micrometersized particles using the focused ion beam lift-out technique. Microsc. Microanal. 7: 418-423.
18. Larson D J, Foord D T, Petford-Long A K, Anthony T C, Rozdilsky I M, Cerezo A, and Smith GWD (1998) Focused ion-beam milling for field-ion specimen preparation:: preliminary investigations. Ultramicroscopy 75: 147-159.
19. Larson D J, Foord D T, Petford-Long A K, Liew H, Blamire M G, Cerezo A, and Smith G W D (1999) Field-ion specimen preparation using focused ion-beam milling. Ultramicroscopy 79: 287-293.
20. Larson D J, Foord D T, Petford-Long A K, Cerezo A, and Smith G W D (1999) Focused ion-beam specimen preparation for atom probe field-ion microscopy characterization of multilayer film structures. Nanotechnology 10: 45-50.
21. Larson D J, Wisman B D, Villieux R J,Martens R L, Gribb T T, Erskine H F, Kelly T F, and Tabat N (2001) Advances in atom probe specimen fabrication from planar multilayer thin film structures. Microsc. Microanal. 7: 24-31.
22. Thompson G B, Miller M K, and Fraser H L (2004) Some aspects of atom probe specimen preparation and analysis of thin film materials. Ultramicroscopy 100: 25-34.
23. MillerMK, Russell K F, and Thompson G B (2005) Strategies for fabricating atom probe specimens with a dual beam FIB. Ultramicroscopy 102: 287-298.
24. Blavette D, Deconihout B, Bostel A, Sarrau J, Bouet M, and Menand A (1993) The tomographic atom probe: a quantitative three-dimensional nanoanalytical instrument on an atomic scale. Rev. Sci. Instr. 64: 2911-2919.
25. Yamaguchi H, Shimase A, Haraaichi S, and Miyauchi T (1985) Characteristics of silicon removal by fine gallium ion beam. J. Vac. Sci. Technol. B 3: 71-74.
26. Ishitani T, Tsuboi H, Yaguchi T, and Koike H (1994) Transmission electron microscope sample preparation using a focused ion beam. J. Electron. Microsc. 43: 322-326.
27. Miller M K, Cerezo A, Hetherington M G, and Smith G D W (1996) Atom Probe Field Ion Microscope (Clarendon Press, Oxford).