Model-based assist feature generation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6521, Issue , 2007, Pages

  Yenikaya, Bayram ^a   Sezginer, Apo ^a  

^a Invarium Inc   (United States)

Author keywords

Assist feature; Image based; Model based; Pixel based; RET

Indexed keywords

ALGORITHMS; IMAGING SYSTEMS; MATHEMATICAL MODELS; OPTIMIZATION; PIXELS;

EDGE PLACEMENT TOLERANCES; FEATURE GENERATION; PHASE WINDOWS;

PHOTOMASKS;

IMAGE ANALYSIS; MASKING; OPTIMIZATION;

EID: 35248892490     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.711504     Document Type: Conference Paper

References (13)

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