Epitaxial growth and surface morphology of aluminum films deposited on mica studied by transmission electron microscopy and atomic force microscopy

Thin Solid Films

Volumn 516, Issue 1, 2007, Pages 17-24

  Higo, Morihide ^a   Fujita, Katsuya ^b   Mitsushio, Masaru ^a   Yoshidome, Toshifumi ^a   Kakoi, Terumi ^a  

^a KAGOSHIMA UNIVERSITY   (Japan)

^b SONY CORPORATION   (Japan)

Author keywords

Aluminum; Atomic force microscopy; Electron diffraction; Epitaxy; Evaporation; Surface roughness; Surface structure; Transmission electron microscopy

Indexed keywords

ALUMINUM; ATOMIC FORCE MICROSCOPY; DEPOSITION; ELECTRON DIFFRACTION; EPITAXIAL GROWTH; MICA; MORPHOLOGY; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY;

FILMS DEPOSITED; SPHERICAL GRAINS; TEMPERATURE RANGE;

METALLIC FILMS;

EID: 34748905204     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.04.046     Document Type: Article

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