Investigation of the reactions during alkylation of chlorine-terminated silicon (111) surfaces

Journal of Physical Chemistry C

Volumn 111, Issue 35, 2007, Pages 13053-13061

  Amy, Sandrine Rivillon ^a   Michalak, David J ^a   Chabal, Yves J ^a   Wielunski, Leszek ^a   Hurley, Patrick T ^b,c   Lewis, Nathan S ^b  

^a RUTGERS UNIVERSITY   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^c Air Products   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALKYLATION; CHEMICAL BONDS; INFRARED SPECTROSCOPY; ORGANOMETALLICS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON;

ALKYLATION REACTION; CHLORINE-TERMINATED SILICON SURFACES; CLEANING PROCESSES; ORGANOMETALLIC MOLECULES;

SURFACE CHEMISTRY;

EID: 34648813637     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp071793f     Document Type: Article

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