Alkylation of silicon(111) surfaces

Journal De Physique. IV : JP

Volumn 132, Issue , 2006, Pages 195-198

  Rivillon, S ^a   Chabal, Y J ^a  

^a Laboratory for Surface Modification   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALKYLATION; CHLORINE; ETCHING; GAS DYNAMICS; INFRARED RADIATION; SPECTROSCOPIC ANALYSIS; SURFACE CHEMISTRY;

CHLORINE-TERMINATED SILICON; INFRA RED ABSORPTION SPECTROSCOPY; METHYLATION;

SILICON;

EID: 33744936803     PISSN: 11554339     EISSN: 17647177     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:2006132037     Document Type: Conference Paper

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