메뉴 건너뛰기




Volumn 17, Issue 7, 2007, Pages 1307-1313

Femtosecond laser direct fabrication of metallic microcantilevers for a micro-corrosion-fatigue test

Author keywords

[No Author keywords available]

Indexed keywords

FATIGUE TESTING; MICROMACHINING; NICKEL COMPOUNDS; OPTIMIZATION;

EID: 34547581841     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/013     Document Type: Article
Times cited : (6)

References (25)
  • 1
    • 29244447104 scopus 로고    scopus 로고
    • A net shape process for metallic microcomponent fabrication using Al and Cu micro/nano powders
    • Kim J S, Jiang K and Chang I 2006 A net shape process for metallic microcomponent fabrication using Al and Cu micro/nano powders J. Micromech. Microeng. 16 48-52
    • (2006) J. Micromech. Microeng. , vol.16 , Issue.1 , pp. 48-52
    • Kim, J.S.1    Jiang, K.2    Chang, I.3
  • 2
    • 33750624644 scopus 로고    scopus 로고
    • Fabrication and application of metallic nano-cantilevers
    • Chakraborty A and Luo C 2006 Fabrication and application of metallic nano-cantilevers Microelectron. J. 37 1306-12
    • (2006) Microelectron. J. , vol.37 , Issue.11 , pp. 1306-1312
    • Chakraborty, A.1    Luo, C.2
  • 3
    • 0037438987 scopus 로고    scopus 로고
    • MEMS device for bending test: Measurements of fatigue and creep of electroplate nickel
    • Larson K P, Rasmussen A A, Ravnkilde J T, Ginnerup M and Hansen O 2003 MEMS device for bending test: measurements of fatigue and creep of electroplate nickel Sensors Actuators A 103 156-64
    • (2003) Sensors Actuators , vol.103 , Issue.1-2 , pp. 156-164
    • Larson, K.P.1    Rasmussen, A.A.2    Ravnkilde, J.T.3    Ginnerup, M.4    Hansen, O.5
  • 4
    • 0035279276 scopus 로고    scopus 로고
    • Microscale materials testing using MEMS actuators
    • Haque M A and Saif M T 2001 Microscale materials testing using MEMS actuators J. Microelectromech. Syst. 10 146-52
    • (2001) J. Microelectromech. Syst. , vol.10 , Issue.1 , pp. 146-152
    • Haque, M.A.1    Saif, M.T.2
  • 6
    • 0000195904 scopus 로고    scopus 로고
    • Fracture testing of silicon microcantilever beams
    • Wilson C J, Ormeggi A and Narbutovskih M 1996 Fracture testing of silicon microcantilever beams J. Appl. Phys. 79 2386-93
    • (1996) J. Appl. Phys. , vol.79 , Issue.5 , pp. 2386-2393
    • Wilson, C.J.1    Ormeggi, A.2    Narbutovskih, M.3
  • 7
    • 0033308365 scopus 로고    scopus 로고
    • Modeling of bonding at an interface crack
    • Goldstein R and Perelmuter M 1999 Modeling of bonding at an interface crack Int. J. Fract. 99 53-79
    • (1999) Int. J. Fract. , vol.99 , pp. 53-79
    • Goldstein, R.1    Perelmuter, M.2
  • 8
    • 3843119792 scopus 로고    scopus 로고
    • Cantilever transducers as a platform for chemical and biological sensors
    • Lavrik N V, Sepaniak M J and Datskos P G 2004 Cantilever transducers as a platform for chemical and biological sensors Rev. Sci. Instrum. 75 2229-53
    • (2004) Rev. Sci. Instrum. , vol.75 , Issue.7 , pp. 2229-2253
    • Lavrik, N.V.1    Sepaniak, M.J.2    Datskos, P.G.3
  • 12
    • 0031258062 scopus 로고    scopus 로고
    • Laser ablation and micromachining with ultrashort laser pulses
    • Liu X, Du D and Mourou G 1997 Laser ablation and micromachining with ultrashort laser pulses IEEE J. Quantum Electron. 33 1706-16
    • (1997) IEEE J. Quantum Electron. , vol.33 , Issue.10 , pp. 1706-1716
    • Liu, X.1    Du, D.2    Mourou, G.3
  • 13
    • 3042845410 scopus 로고    scopus 로고
    • Femtosecond laser micromachining of grooves in indium phosphide
    • Borowiec A and Haugen H K 2004 Femtosecond laser micromachining of grooves in indium phosphide Appl. Phys. A 79 521-9
    • (2004) Appl. Phys. , vol.79 , pp. 521-529
    • Borowiec, A.1    Haugen, H.K.2
  • 14
    • 33748504376 scopus 로고    scopus 로고
    • Fast electronic and thermal processes in femtosecond laser ablation of Au
    • Dachraoui H and Husinsky W 2006 Fast electronic and thermal processes in femtosecond laser ablation of Au Appl. Phys. Lett. 89 104102
    • (2006) Appl. Phys. Lett. , vol.89 , Issue.10 , pp. 104102
    • Dachraoui, H.1    Husinsky, W.2
  • 16
    • 0037670796 scopus 로고    scopus 로고
    • Ablation and cutting of planar silicon devices using femtosecond laser pulses
    • Bärsch N, Körber K, Ostendorf A and Tönshoff K H 2003 Ablation and cutting of planar silicon devices using femtosecond laser pulses Appl. Phys. A 77 237-42
    • (2003) Appl. Phys. , vol.77 , pp. 237-242
    • Bärsch, N.1    Körber, K.2    Ostendorf, A.3    Tönshoff, K.H.4
  • 17
    • 0034346278 scopus 로고    scopus 로고
    • Microstructuring with femtosecond lasers
    • Nolte S et al 2000 Microstructuring with femtosecond lasers Adv. Eng. Mater. 2 23-7
    • (2000) Adv. Eng. Mater. , vol.2 , Issue.1-2 , pp. 23-27
    • Nolte, S.1    Al, E.2
  • 18
    • 33644590266 scopus 로고    scopus 로고
    • Ablation of thin metal films by short-pulsed lasers coupled through near-field scanning optical microscopy probes
    • Hwang D J, Chimmalgi A and Grigoropoulos C P 2006 Ablation of thin metal films by short-pulsed lasers coupled through near-field scanning optical microscopy probes J. Appl. Phys. 99 044905
    • (2006) J. Appl. Phys. , vol.99 , pp. 044905
    • Hwang, D.J.1    Chimmalgi, A.2    Grigoropoulos, C.P.3
  • 20
    • 34250722263 scopus 로고    scopus 로고
    • Shipilov S A 2007 Solving some key failure analysis problems using advanced methods for materials testing Eng. Fail. Anal. doi: 10.1016/j.engfailanal. 2006.12. 003
    • (2007)
    • Shipilov, S.A.1
  • 21
    • 0029380143 scopus 로고
    • The influence of loading waveform on corrosion fatigue crack propagation
    • Wang Z, Li J and Wang J 1995 The influence of loading waveform on corrosion fatigue crack propagation Corros. Sci. 37 1551-65
    • (1995) Corros. Sci. , vol.37 , Issue.10 , pp. 1551-1565
    • Wang, Z.1    Li, J.2    Wang, J.3
  • 22
    • 0037865564 scopus 로고    scopus 로고
    • Mechanical characterization of micro/nanoscale structures for MEMS/NEMS applications using nanoindentation techniques
    • Li X and Bhushan B 2003 Mechanical characterization of micro/nanoscale structures for MEMS/NEMS applications using nanoindentation techniques Ultramicroscopy 97 481-98
    • (2003) Ultramicroscopy , vol.97 , Issue.1-4 , pp. 481-498
    • Li, X.1    Bhushan, B.2
  • 23
    • 0038790007 scopus 로고    scopus 로고
    • MEMS reliability from a failure mechanisms perspective
    • van Spengen W M 2003 MEMS reliability from a failure mechanisms perspective Microelectron. Reliab. 43 1049-60
    • (2003) Microelectron. Reliab. , vol.43 , Issue.7 , pp. 1049-1060
    • Van Spengen, W.M.1
  • 24
    • 0041822942 scopus 로고    scopus 로고
    • Room temperature creep behavior of nanocrystalline nickel produced by an electrodeposition technique
    • Wang N, Wang Z, Aust K T and Erb U 1997 Room temperature creep behavior of nanocrystalline nickel produced by an electrodeposition technique Mater. Sci. Eng. A 237 150-8
    • (1997) Mater. Sci. Eng. , vol.237 , Issue.2 , pp. 150-158
    • Wang, N.1    Wang, Z.2    Aust, K.T.3    Erb, U.4
  • 25
    • 0036478720 scopus 로고    scopus 로고
    • A review of nanoindentation continuous stiffness measurement technique and its applications
    • Li X and Bhushan B 2002 A review of nanoindentation continuous stiffness measurement technique and its applications Mater. Charact. 48 11-36
    • (2002) Mater. Charact. , vol.48 , Issue.1 , pp. 11-36
    • Li, X.1    Bhushan, B.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.