Investigation of H+ and B+/H+ implantation in LiTaO3 single-crystals

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 184, Issue 4, 2001, Pages 531-535

  Wan, Qing ^a   Wang, Lianwei ^a   Liu, Weili ^a   Zhang, Miao ^a   Lin, Chenglu ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Ion implantation; Layer transfer; LiTaO3; SAW

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ANNEALING; ATOMIC FORCE MICROSCOPY; ION IMPLANTATION; LITHIUM COMPOUNDS; OPTICAL MICROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; X RAY ANALYSIS;

X RAY ROCKING CURVES;

SINGLE CRYSTALS;

EID: 0035576733     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00827-8     Document Type: Article

References (14)