Electrostatically coupled micromechanical beam filters

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 584-587

  Pourkamali, Siavash ^a   Abdolvand, Reza ^a   Ho, Gavin K ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; BANDWIDTH; COMPUTER SIMULATION; ELECTRIC FREQUENCY CONTROL; ELECTRODES; ENERGY GAP; RESONATORS; SYNTHESIS (CHEMICAL);

COUPLING GAPS; ELECTRIC COUPLINGS; MICROMECHANICAL FILTERS; ULTRA HIGH FREQUENCY (UHF);

MICROELECTROMECHANICAL DEVICES;

EID: 3042699930     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. A.-C. Wong, et al., "Anneal-activated, tunable, 68MHz micromechanical filters", Sensors and Actuators 99, 1390-1393.
2. D. S. Greywall, et al, "Coupled micromechanical drumhead resonators with practical applications as electromechanical bandpass filters", J. Micromech. Microeng. 12 (2002) 925-938.
3. R. A. Johnson, "Mechnical filters in electronics", A Wiley-interscience publication.
4. S. Pourkamali, et al., "A 600kHz electrically coupled MEMS bandpass filter", MEMS'03, pp. 702-705.