Electrically coupled MEMS bandpass filters: Part II. Without coupling element

Sensors and Actuators, A: Physical

Volumn 122, Issue 2, 2005, Pages 317-325

  Pourkamali, Siavash ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electrostatic coupling; Micromechanical filter; Microresonator; Quality factor; SOI

Indexed keywords

BANDWIDTH; COUPLED CIRCUITS; ELECTRIC POTENTIAL; MICROELECTROMECHANICAL DEVICES; RESONATORS; SILICON; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

ELECTROSTATIC COUPLING; MICROMECHANICAL FILTERS; MICRORESONATORS; QUALITY FACTORS; SOI;

BANDPASS FILTERS;

EID: 23344433382     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.039     Document Type: Article

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