Isotope effects between hydrogen and deuterium microwave plasmas on chemical vapor deposition homoepitaxial diamond growth

Journal of Applied Physics

Volumn 101, Issue 10, 2007, Pages

  Mizuochi, N ^a,b,c   Isoya, J ^a,b,c   Niitsuma, J ^d   Sekiguchi, T ^d   Watanabe, H ^a,c   Kato, H ^a,c   Makino, T ^a,c   Okushi, H ^a,c   Yamasaki, S ^a,c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

^c JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^d NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODOLUMINESCENCE; CHEMICAL VAPOR DEPOSITION; DEUTERIUM; DIAMONDS; EPITAXIAL GROWTH; HYDROGEN; OPTICAL MICROSCOPY; PARAMAGNETIC RESONANCE; POINT DEFECTS;

ETCHING EFFECTS; ETCHING RATE; ISOTOPE EFFECTS; MICROWAVE PLASMAS;

WAVE PLASMA INTERACTIONS;

EID: 34249889586     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2727380     Document Type: Article

References (34)

1. H. Okushi, Diamond Relat. Mater. 0925-9635 10.1016/S0925-9635(00)00399-X 10, 281 (2001).
2. S. Yamanaka, H. Watanabe, S. Masai, D. Takeuchi, H. Okushi, and K. Kajimura, Jpn. J. Appl. Phys., Part 2 37, L 1129 (1998).
3. H. Kato, H. Okushi, and S. Yamasaki, Appl. Phys. Lett. 0003-6951 10.1063/1.1944228 86, 222111 (2005).
4. M. Katagiri, J. Isoya, S. Koizumi, and H. Kanda, Appl. Phys. Lett. 0003-6951 10.1063/1.1840119 85, 6365 (2004).
5. J. Isberg, J. Hammersberg, E. Johansson, T. Wikström, D. J. Twitchen, A. J. Whitehead, S. E. Coe, and G. A. Scarsbrook, Science 0036-8075 10.1126/science.1074374 297, 1670 (2002).
6. T. Teraji, K. Arima, H. Wada, and T. Ito, J. Appl. Phys. 0021-8979 10.1063/1.1805180 96, 5906 (2004).
7. A. Tallaire, A. T. Collins, D. Charles, J. Achard, R. Sussmann, A. Gicquel, M. E. Newton, A. M. Edmonds, and R. J. Cruddace, Diamond Relat. Mater. 0925-9635 10.1016/j.diamond.2006.02.005 15, 1700 (2006).
8. D. Takeuchi, H. Watanabe, S. Yamanaka, H. Okushi, H. Sawada, H. Ichinose, and T. Sekiguchi, Phys. Rev. B 0163-1829 10.1103/PhysRevB.63.245328 63, 245328 (2001).
9. N. Mizuochi, H. Watanabe, H. Okushi, S. Yamasaki, J. Niitsuma, and T. Sekiguchi, Appl. Phys. Lett. 0003-6951 10.1063/1.2176860 88, 091912 (2006).
10. S. Yamanaka, H. Watanabe, S. Masai, S. Kawata, K. Hayashi, D. Takeuchi, H. Okushi, and K. Kajimura, J. Appl. Phys. 0021-8979 10.1063/1.368922 84, 6095 (1998).
11. L. S. Plano, in Diamond: Electronic Properties and Applications, edited by, L. S. Pan, (Kluwer Academic, Dordrecht, 1995), Chap. 3, p. 64.
12. C. C. Battaile, D. J. Srolovitz, I. I. Oleinik, D. G. Pettifor, A. P. Sutton, S. J. Harris, and J. E. Butler, J. Chem. Phys. 0021-9606 10.1063/1.479727 111, 4291 (1999).
13. H. Iwakuro, T. Kuroda, D. H. Shen, and Z. Lin, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.589160 14, 707 (1996).
14. G. Ganguly, S. Yamasaki, and A. Matsuda, Philos. Mag. 1478-6435 63, 281 (1991).
15. J. W. Lyding, K. Hess, and I. C. Kizilyalli, Appl. Phys. Lett. 0003-6951 10.1063/1.116172 68, 2526 (1996).
16. J. Chevallier, F. Jomard, Z. Teukam, S. Koizumi, H. Kanda, Y. Sato, A. Deneuville, and M. Bernard, Diamond Relat. Mater. 0925-9635 10.1016/S0925- 9635(02)00063-8 11, 1566 (2002).
17. F. Fuchs, C. Wild, K. Schwarz, and P. Koidl, Diamond Relat. Mater. 0925-9635 10.1016/0925-9635(94)05247-6 4, 652 (1995).
18. K. Kanaya and S. Okayama, J. Phys. D 5, 43 (1972).
19. N. Mizuochi, H. Watanabe, J. Isoya, H. Okushi, and S. Yamasaki, Diamond Relat. Mater. 0925-9635 10.1016/j.diamond.2003.11.028 13, 765 (2004); N. Mizuochi, M. Ogura, H. Watanabe, J. Isoya, H. Okushi, and S. Yamasaki, Diamond Relat. Mater. 0925-9635 13, 2096 (2004).
20. N. Mizuochi, H. Watanabe, J. Isoya, H. Okushi, and S. Yamasaki, Diamond Relat. Mater. 0925-9635 10.1016/j.diamond.2003.11.028 13, 765 (2004); N. Mizuochi, M. Ogura, H. Watanabe, J. Isoya, H. Okushi, and S. Yamasaki, Diamond Relat. Mater. 0925-9635 13, 2096 (2004).
21. J. A. Weil, J. R. Bolton, and J. E. Wertz, Electron Paramagnetic Resonance (Wiley, New York, 1994).
22. C. Glover, M. E. Newton, P. M. Martineau, S. Quinn, and D. J. Twitchen, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.92.135502 92, 135502 (2004).
23. H. Watanabe, K. Hayashi, D. Takeuchi, S. Yamanaka, H. Okushi, and K. Kajimura, Appl. Phys. Lett. 0003-6951 10.1063/1.122059 73, 981 (1998).
24. S. G. Ri, H. Yoshida, S. Yamanaka, H. Watanabe, D. Takeuchi, and H. Okushi, J. Cryst. Growth 0022-0248 10.1016/S0022-0248(01)01801-2 235, 300 (2002).
25. C. S. Trevisan and J. Tennyson, Plasma Phys. Controlled Fusion 0741-3335 10.1088/0741-3335/44/7/315 44, 1263 (2002).
26. A. G. Engelhardt and A. V. Phelps, Phys. Rev. 0031-899X 10.1103/PhysRev.131.2115 131, 2115 (1963).
27. H. Tawara, Y. Itikawa, H. Nishimura, and M. Yoshino, J. Phys. Chem. Ref. Data 0047-2689 19, 617 (1990).
28. H. C. Barshilia and V. D. Vankar, J. Appl. Phys. 0021-8979 10.1063/1.363318 80, 3694 (1996).
29. H. C. Urey, F. G. Brickwedde, and G. M. Murphy, Phys. Rev. 0031-899X 10.1103/PhysRev.40.1 40, 1 (1932).
30. M. Binnewies and E. Milke, Thermochemical Data of Elements and Compounds (Wiley, Weinheim, 2002).
31. Landolt-Börnstein, in Thermodynamic Properties of Inorganic Materials, New Series, Group IV: Physical Chemistry, edited by, W. Martienssen, (Springer, Berlin, 2000), Vol. 19.
32. S. C. Saxena and V. K. Saxena, J. Phys. A 0305-4470 10.1088/0305-4470/3/ 3/018 3, 309 (1970).
33. J. A. Kerr and D. W. Stocker, in CRC Handbook of Chemistry and Physics, edited by, D. R. Lide, (CRC Press, Boca Raton, 2000).
34. C. G. van de Walle and W. B. Jackson, Appl. Phys. Lett. 0003-6951 10.1063/1.117664 69, 2441 (1996).