SCOPUS 정보 검색 플랫폼

Diamond and Related Materials

Volumn 11, Issue 8, 2002, Pages 1566-1571

Hydrogen in n-type diamond

(8) Chevallier, J a Jomard, F a Teukam, Z a Koizumi, S b Kanda, H b Sato, Y b Deneuville, A c Bernard, M c

a Centre National de la Recherche Scientifique (France)

b NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

c CNRS (France)

Author keywords

Hydrogen; Microwave plasma chemical vapor deposition; N type diamond; Semiconductors

Indexed keywords

DEUTERIUM; DIFFUSION; DOPING (ADDITIVES); FILM GROWTH; HYDROGEN; PASSIVATION; PHOSPHORUS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

HOMOEPITAXIAL FILMS;

DIAMONDS;

DIAMOND;

EID: 0036647155 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(02)00063-8 Document Type: Article

Times cited : (38)

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