Development of a novel piezo-driven parallel-kinematics single crystal silicon micropositioning XY stage

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5836, Issue , 2005, Pages 56-66

  Yao, Qing ^a   Ferreira, Placid M ^a   Mukhopadhyay, Deepkishore ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Flexure hinge; Micropositioning; Parallel kinematics; Piezoelectric actuator; Single crystal silicon; XY stage

Indexed keywords

ACTUATORS; BENDING STRENGTH; HINGES; KINEMATICS; PIEZOELECTRIC DEVICES; SINGLE CRYSTALS;

FLEXURE HINGE; MICROPOSITIONING; PARALLEL KINEMATICS; PIEZOELECTRIC ACTUATOR; SINGLE CRYSTAL SILICON; XY STAGE;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 28344453758     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.605632     Document Type: Conference Paper

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