Electromagnetic micro x-y stage with very thick Cu coil for probe-based mass data storage device

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4334, Issue , 2001, Pages 363-371

  Choi, J J ^a   Park, H ^a   Kyu Yong Kim, ^a   Jong Up Jeon, ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Data storage; Electromagnetic; Probe; x y stage

Indexed keywords

ELECTRIC COILS; LASER DOPPLER VELOCIMETERS; MAGNETOELECTRIC EFFECTS; PERMANENT MAGNETS; PLASMA ETCHING; POLYAMIDES; SILICON;

DYNAMIC SIGNAL ANALYZERS (DSA);

DATA STORAGE EQUIPMENT;

EID: 0035157009     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.436622     Document Type: Conference Paper

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