Cellular automata modeling in MEMS design

Sensors and Materials

Volumn 9, Issue 7, 1997, Pages 437-448

  Hubbard, Ted J ^a   Antonsson, Erik K ^b  

^a DALHOUSIE UNIVERSITY   (Canada)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

CAD; Cellular automata; Etching simulation; MEMS; Micromachines

Indexed keywords

EID: 0031326056     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. S. D. Senturia, R. M. Harris, B. P. Johnson, S. Kim, M. A. Shulman and J. K. White: Journal of Microelectomechanical Systems 1 (1992) 3.
2. K. D. Wise: MEMS '91 (Institute of Electrical Engineers, Nara, Japan, 1991) p. 33.
3. G. DeLapierre: Sensors and Actuators 31 (1992) 267.
4. D. W. Shaw: J. Cryst. Gr. 47 (1979) 509.
5. T. Thurgate: IEEE Transactions on Computer-Aided Design 10 (1991) 1101.