Electrothermal frequency tuning of folded and coupled vibrating micromechanical resonators

Journal of Microelectromechanical Systems

Volumn 7, Issue 2, 1998, Pages 164-171

  Syms, Richard R A ^a,b,c  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF OXFORD   (United Kingdom)

^c Dept of Microsystems Technology ^*  (United Kingdom)

Author keywords

Micromechanics; Resonators; Sensors

Indexed keywords

ATMOSPHERIC PRESSURE; HEAT CONDUCTION; MACHINE VIBRATIONS; MATHEMATICAL MODELS; NATURAL FREQUENCIES; PRESSURE EFFECTS; RESONATORS; SENSORS; STRESS CONCENTRATION; THERMAL EFFECTS; THERMAL EXPANSION; TUNING;

ELECTROTHERMAL FREQUENCY TUNING; MICROMECHANICAL RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032099926     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.679341     Document Type: Article

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