Micro-actuator for tera-storage

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 441-446

  Hirano, Toshiki ^a   Fan, Long Sheng ^a   Semba, Tetsuo ^a   Lee, Wen Y ^a   Hong, John ^a   Pattanaik, Surya ^a   Webb, Patrick ^a   Juan, Wen Han ^a   Chan, Susanna ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRODES; ETCHING; HARD DISK STORAGE; MAGNETIC HEADS; POLYMERS; SERVOMECHANISMS; STORAGE ALLOCATION (COMPUTER);

HARD DISK DRIVES (HDD);

MICROACTUATORS;

EID: 0032665526     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746869     Document Type: Conference Paper

References (14)