Diamond-like carbon films deposited using a broad, uniform ion beam from an RF inductively coupled CH4-plasma source

Diamond and Related Materials

Volumn 7, Issue 7, 1998, Pages 965-972

  Druz, B ^a   Ostan, E ^a   Distefano, S ^a   Hayes, A ^a   Kanarov, V ^a   Polyakov, V ^b   Rukovishnikov, A ^b   Rossukanyi, N ^b   Khomich, A ^b  

^a VEECO INSTRUMENTS INC   (United States)

^b INSTITUTE OF RADIO ENGINEERING AND ELECTRONICS   (Russian Federation)

Author keywords

DLC film; Hydrocarbon; Ion beam deposition; RF ion source

Indexed keywords

CARBON; HYDROCARBONS; ION BEAMS; PLASMA APPLICATIONS;

DIAMOND-LIKE FILMS; ION BEAM DEPOSITION;

DIAMOND FILMS;

EID: 0032120023     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00338-5     Document Type: Article

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