Device physics of capacitive MEMS

Microelectronic Engineering

Volumn 84, Issue 9-10, 2007, Pages 2158-2164

  Felnhofer, D ^a   Khazeni, K ^a   Mignard, M ^a   Tung, Y J ^a   Webster, J R ^a   Chui, C ^a   Gusev, E P ^a  

^a QUALCOMM INC   (United States)

Author keywords

Charging; IMOD display technology; Internal photoemission; MEMS

Indexed keywords

CAPACITANCE; DIELECTRIC PROPERTIES; ELECTRON TRANSPORT PROPERTIES; INTERFEROMETRY; MODULATORS; MOS DEVICES;

IMOD DISPLAY TECHNOLOGY; INTERNAL PHOTOEMISSION;

MEMS;

EID: 34248644340     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.04.118     Document Type: Article

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