MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6464, Issue , 2007, Pages

  Han, Jong H ^a   Rajagopalan, Jagannathan ^a   Saif, M Taher A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Aluminum; Electrical resistivity; In situ uniaxial tensile; MEMS; Nanocrystalline; SEM; TEM

Indexed keywords

ELECTRIC CONDUCTIVITY; LITHOGRAPHY; MEMS; NANOCRYSTALLINE ALLOYS; SCANNING ELECTRON MICROSCOPY; TENSILE TESTING; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRICAL RESISTIVITY MEASUREMENT; IN SITU UNIAXIAL TENSILE; NANOCRYSTALLINE METAL FILMS; THICK ALUMINUM FILMS;

METALLIC FILMS;

EID: 34248551443     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.706115     Document Type: Conference Paper

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