Surface profile measurement of a sinusoidal grid using an atomic force microscope on a diamond turning machine

Precision Engineering

Volumn 31, Issue 3, 2007, Pages 304-309

  Gao, Wei ^a   Aoki, Jun ^a   Ju, Bing Feng ^a   Kiyono, Satoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Atomic force microscope; Diamond turning machine; Linear encoder; Measurement; Sinusoidal grid; Surface profile

Indexed keywords

ALUMINUM; ATOMIC FORCE MICROSCOPY; MICROSTRUCTURE; TURNING;

DIAMOND TURNING MACHINE; LINEAR ENCODER; SINUSOIDAL GRID; SURFACE PROFILE;

SURFACE MEASUREMENT;

EID: 34248362870     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2007.01.003     Document Type: Article

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