A new method for improving the accuracy of SPM and its application to AFM in liquids

JSME International Journal. Series C: Mechanical Systems, Machine Elements and Manufacturing

Volumn 42, Issue 4, 1999, Pages 877-883

  Gao, Wei ^a   Nomura, Michinao ^b   Kweon, Hyun Kyu ^a   Oka, Toru ^c   Liu, Qinggang ^d   Kiyono, Satoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b FUJITSU LABORATORIES LTD   (Japan)

^c MITSUBISHI ELECTRIC CORPORATION   (Japan)

^d NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

AFM in Liquid; Image Distortion; In Situ Calibration; Linearity Error; Measurement; Monitoring Method; PZT element; Self calibration; Shape Measurement; Z direction

Indexed keywords

APPROXIMATION THEORY; ATOMIC FORCE MICROSCOPY; CALIBRATION; COMPUTATIONAL METHODS; HYSTERESIS; IMAGE ANALYSIS; INTEGRAL EQUATIONS; MEASUREMENT ERRORS; PIEZOELECTRIC DEVICES; SAMPLING; SIGNAL DISTORTION;

CALIBRATION CURVE FUNCTIONS; SELF-CALIBRATION METHODS;

ACTUATORS;

ACTUATOR; MICROSCOPY; PIEZOELECTRICITY;

EID: 0033502317     PISSN: 13447653     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmec.42.877     Document Type: Article

References (10)

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