Industrial uses of STM and AFM

CIRP Annals - Manufacturing Technology

Volumn 46, Issue 2, 1997, Pages 597-620

  Vorburger, T V ^a   Dagata, J A ^a   Wilkening, G ^b   Iizuka, K ^c   Thwaite, E G ^d   Lonardo, P ^d  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^c NIKON CORPORATION   (Japan)

^d NONE

Author keywords

Atomic force microscopy (AFM); Scanning probe microscopy (SPM); Scanning tunneling microscopy (STM)

Indexed keywords

ATOMIC FORCE MICROSCOPY; INDUSTRIAL APPLICATIONS; PROBLEM SOLVING; SCANNING TUNNELING MICROSCOPY;

SCANNING PROBE MICROSCOPY (SPM);

MICROSCOPIC EXAMINATION;

EID: 0031332840     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60881-6     Document Type: Article

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