Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor

Precision Engineering

Volumn 30, Issue 4, 2006, Pages 396-405

  Gao, Wei ^a   Motoki, Takenori ^a   Kiyono, Satoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

AFM; Alignment; Diamond cutting tool; Edge; Measurement; Optical sensor; Positioning; Wear

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIAMOND CUTTING TOOLS; LASER BEAMS; OPTICAL SENSORS; PHOTODIODES; WEAR OF MATERIALS;

ELECTRONIC NOISE; PROFILE MEASUREMENT; SINUSOIDAL CURRENTS;

PROFILOMETRY;

EID: 33748808438     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2005.11.008     Document Type: Article

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